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Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou.

By: Language: İngilizce Publisher: Boca Raton : CRC Press, c2002Edition: 2nd edDescription: 723 p. : col. ill. ; 29 cmISBN:
  • 0849308267
Subject(s): LOC classification:
  • TK7836 .M33 2002
Contents:
Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA and Micromolding -- Ch. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing -- Ch. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice -- Ch. 9. Scaling, Actuators, and Power in Miniaturized Systems -- Ch. 10. Miniaturization Applications -- App. A. Metrology Techniques for MEMS -- App. B. Living Book -- App. C. Si and SiO[subscript 2] Etch Rates in KOH -- App. D. Genetics -- App. F. MEMS Companies.
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Item type Current library Home library Collection Call number Vol info Copy number Status Date due Barcode Course reserves
Reserve-3h Reserve-3h Merkez Kütüphane Ayrılmış Ders Kitapları / Course Reserves Merkez Kütüphane Ayrılmış ders kitapları TK7836 .M33 2002 (Browse shelf(Opens below)) 1 1 Available 0028335

Nanomalzemeler ve Üretim Metodları Güz Dönemi

Browsing Merkez Kütüphane shelves, Shelving location: Ayrılmış Ders Kitapları / Course Reserves, Collection: Ayrılmış ders kitapları Close shelf browser (Hides shelf browser)
TK5101 .P755 2014 c.5 Fundamentals of communication systems / TK5101 .P755 2014 c.6 Fundamentals of communication systems / TK5103.2 .G65 2013 Wireless communications / TK7836 .M33 2002 Fundamentals of microfabrication : the science of miniaturization / TK7867 .N43 2010 c.2 Microelectronics : circuit analysis and design / TK7874.654 .R39 2001 Design of analog CMOS integrated circuits / TK7888.3 .M366 2007 Digital design /

Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA and Micromolding -- Ch. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing -- Ch. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice -- Ch. 9. Scaling, Actuators, and Power in Miniaturized Systems -- Ch. 10. Miniaturization Applications -- App. A. Metrology Techniques for MEMS -- App. B. Living Book -- App. C. Si and SiO[subscript 2] Etch Rates in KOH -- App. D. Genetics -- App. F. MEMS Companies.

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Devinim Yazılım Eğitim Danışmanlık tarafından Koha'nın orjinal sürümü uyarlanarak geliştirilip kurulmuştur.