MARC details
| 000 -LEADER |
|---|
| fixed length control field |
02098 a2200433 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
74136 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
TR-AnTOB |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20200601131846.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
161031s2002 flu 001 0 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0849308267 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
DLC |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
İngilizce |
| 050 #0 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7836 |
| Item number |
.M33 2002 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7836 .M33 2002 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Madou, Marc J. |
| 9 (RLIN) |
53273 |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Fundamentals of microfabrication : |
| Remainder of title |
the science of miniaturization / |
| Statement of responsibility, etc. |
Marc J. Madou. |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Boca Raton : |
| Name of producer, publisher, distributor, manufacturer |
CRC Press, |
| Date of production, publication, distribution, manufacture, or copyright notice |
c2002. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
723 p. : |
| Other physical details |
col. ill. ; |
| Dimensions |
29 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
|
| 505 ## - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Ch. 1. Lithography -- |
| Title |
Ch. 2. Pattern Transfer with Dry Etching Techniques -- |
| -- |
Ch. 3. Pattern Transfer with Additive Techniques -- |
| -- |
Ch. 4. Wet Bulk Micromachining -- |
| -- |
Ch. 5. Surface Micromachining -- |
| -- |
Ch. 6. LIGA and Micromolding -- |
| -- |
Ch. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing -- |
| -- |
Ch. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice -- |
| -- |
Ch. 9. Scaling, Actuators, and Power in Miniaturized Systems -- |
| -- |
Ch. 10. Miniaturization Applications -- |
| -- |
App. A. Metrology Techniques for MEMS -- |
| -- |
App. B. Living Book -- |
| -- |
App. C. Si and SiO[subscript 2] Etch Rates in KOH -- |
| -- |
App. D. Genetics -- |
| -- |
App. F. MEMS Companies. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Lasers |
| General subdivision |
Industrial applications |
| 9 (RLIN) |
24594 |
|
|---|
| Topical term or geographic name entry element |
Mikroelektromekanik sistemler |
| General subdivision |
Tasarım ve yapım |
| 9 (RLIN) |
53277 |
|
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| General subdivision |
Design and construction |
| 9 (RLIN) |
53278 |
|
|---|
| Topical term or geographic name entry element |
Lazerler |
| General subdivision |
Endüstriyel uygulamalar |
| Source of heading or term |
etuturkob |
| 9 (RLIN) |
53274 |
|
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Design and construction |
| 9 (RLIN) |
386 |
|
|---|
| Topical term or geographic name entry element |
Entegre devreler |
| General subdivision |
Tasarım ve yapım |
| 9 (RLIN) |
28191 |
|
|---|
| Topical term or geographic name entry element |
Mikroelektronik ambalajlama |
| 9 (RLIN) |
53275 |
|
|---|
| Topical term or geographic name entry element |
Microelectronic packaging |
| 9 (RLIN) |
405 |
|
|---|
| Topical term or geographic name entry element |
Microelectronics |
| 9 (RLIN) |
2433 |
|
|---|
| Topical term or geographic name entry element |
Mikroelektronik |
| 9 (RLIN) |
13748 |
|
|---|
| Topical term or geographic name entry element |
Machining |
| 9 (RLIN) |
21834 |
|
|---|
| Topical term or geographic name entry element |
Makineleştirme |
| 9 (RLIN) |
53276 |
| 902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) |
|---|
| a |
0028335 |
| 903 ## - LOCAL DATA ELEMENT C, LDC (RLIN) |
|---|
| a |
Merkez Kütüphane |
| 945 ## - LOCAL PROCESSING INFORMATION (OCLC) |
|---|
| a |
OG, CS |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Book |
