000			02098 a2200433 4500
001			74136
999			_c74136 _d23302
003			TR-AnTOB
005			20200601131846.0
008			161031s2002 flu 001 0
020			_a0849308267
040			_aDLC _cDLC _dDLC
041			_aeng
050		0	_aTK7836 _b.M33 2002
090			_aTK7836 .M33 2002
100	1		_aMadou, Marc J. _953273
245	1	0	_aFundamentals of microfabrication : _bthe science of miniaturization / _cMarc J. Madou.
250			_a2nd ed.
264		1	_aBoca Raton : _bCRC Press, _cc2002.
300			_a723 p. : _bcol. ill. ; _c29 cm.
504			_aIncludes bibliographical references and index.
505			_aCh. 1. Lithography -- _tCh. 2. Pattern Transfer with Dry Etching Techniques -- _tCh. 3. Pattern Transfer with Additive Techniques -- _tCh. 4. Wet Bulk Micromachining -- _tCh. 5. Surface Micromachining -- _tCh. 6. LIGA and Micromolding -- _tCh. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing -- _tCh. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice -- _tCh. 9. Scaling, Actuators, and Power in Miniaturized Systems -- _tCh. 10. Miniaturization Applications -- _tApp. A. Metrology Techniques for MEMS -- _tApp. B. Living Book -- _tApp. C. Si and SiO[subscript 2] Etch Rates in KOH -- _tApp. D. Genetics -- _tApp. F. MEMS Companies.
650		0	_aLasers _xIndustrial applications _924594
650			_aMikroelektromekanik sistemler _xTasarım ve yapım _953277
650			_aMicroelectromechanical systems _xDesign and construction _953278
650		7	_aLazerler _xEndüstriyel uygulamalar _2etuturkob _953274
650			_aIntegrated circuits _xDesign and construction _9386
650			_aEntegre devreler _xTasarım ve yapım _928191
650			_aMikroelektronik ambalajlama _953275
650			_aMicroelectronic packaging _9405
650			_aMicroelectronics _92433
650			_aMikroelektronik _913748
650			_aMachining _921834
650			_aMakineleştirme _953276
902			_a0028335
903			_aMerkez Kütüphane
945			_aOG, CS
942			_cBK