| 000 | 01064 a2200325 4500 | ||
|---|---|---|---|
| 001 | 57348 | ||
| 999 |
_c57348 _d14544 |
||
| 003 | TR-AnTOB | ||
| 005 | 20190408214020.0 | ||
| 008 | 070113s2003 flua b 001 0 eng | ||
| 010 | _a2002031599 | ||
| 020 | _a1584883065 (alk. paper) | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 |
_aTK7875 _b.P45 2003 |
||
| 090 | _aTK7875 .P45 2003 | ||
| 100 |
_aPelesko, John A. _929923 |
||
| 245 | 0 |
_aModeling MEMS and NEMS / _cJohn A. Pelesko and David H. Bernstein. |
|
| 264 | 1 |
_aBoca Raton, FL : _bChapman & Hall/CRC, _c2003. |
|
| 300 |
_axxiii, 357 p. : _bill. ; 24 cm. |
||
| 504 | _aIncludes bibliographical references and i(p. 325-340) and index. | ||
| 650 |
_aMicroelectromechanical systems _xMathematical models _929925 |
||
| 650 |
_aMikroelektromekanik sistemler _xMatematiksel modeller _929926 |
||
| 700 |
_aBernstein, David H. _929924 |
||
| 856 | 4 |
_uhttp://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html _3Publisher description |
|
| 901 | _a0017676 | ||
| 902 | _abs | ||
| 942 | _cBK | ||