| 000 | 01049 a2200325 4500 | ||
|---|---|---|---|
| 001 | 13085 | ||
| 999 |
_c13085 _d2274 |
||
| 003 | TR-AnTOB | ||
| 005 | 20240912131357.0 | ||
| 008 | 010601s20012002flua bf 001 0 eng | ||
| 010 | _a2001037402 | ||
| 015 | _aGBA1-W1351 | ||
| 020 | _a0849300770 (alk. paper) | ||
| 035 | _a(OCoLC)ocm47091984 | ||
| 040 |
_aDLC _cDLC _dUKM _dC |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 | 0 |
_aTJ151 _b.M46 2002 |
|
| 090 | _aTJ151 .M46 2002 | ||
| 245 | 4 |
_aThe MEMS handbook / _cedited by Mohamed Gad-el-Hak. |
|
| 264 | 1 |
_aBoca Raton, Fla. : _bCRC Press, _cc2002.[2001]. |
|
| 300 |
_a1 v. (various pagings) : _bill. ; _c26 cm. |
||
| 490 | 0 | _aThe mechanical engineering handbook series. | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMechanical engineering _vHandbooks, manuals, etc. _95800 |
|
| 650 |
_aMicroelectromechanical systems _9718 |
||
| 700 | 1 |
_aGad-el-Hak, Mohamed, _d1945- _921612 |
|
| 852 |
_yAvailable _712804959 |
||
| 942 | _cBK | ||