| 000 | 00807 a2200277 4500 | ||
|---|---|---|---|
| 001 | 12093 | ||
| 999 |
_c12093 _d1727 |
||
| 003 | TR-AnTOB | ||
| 005 | 20200601130006.0 | ||
| 008 | 000615s2001 njua b 001 0 eng | ||
| 010 | _a00055721 | ||
| 020 | _a0130224049 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 | 0 |
_aTK7871.85 _bX53 2001 |
|
| 090 | _aTK7871.85 X53 2001 | ||
| 100 |
_aXiao, Hong _94530 |
||
| 245 | 0 |
_aIntroduction to semiconductor manufacturing technology / _cHong Xiao. |
|
| 264 | 1 |
_aUpper Saddle River, N.J. : _bPrentice Hall, _cc2001. |
|
| 300 |
_aviii, 647 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductor industry _94531 |
|
| 650 |
_aSemiconductors _xDesign and construction _9889 |
||
| 942 | _cBK | ||