| 000 | 00857 a2200289 4500 | ||
|---|---|---|---|
| 001 | 11012 | ||
| 999 |
_c11012 _d938 |
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| 003 | TR-AnTOB | ||
| 005 | 20200508151553.0 | ||
| 008 | 000518s2001 njua b 001 0 eng | ||
| 010 | _a00041653 | ||
| 020 | _a0130815209 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 | 0 |
_aTK7836 _b.Q27 2001 |
|
| 090 | _aTK7836 .Q27 2001 | ||
| 100 |
_aQuirk, Michael, _d1953- _92732 |
||
| 245 | 0 |
_aSemiconductor manufacturing technology / _cMichael Quirk, Julian Serda. |
|
| 264 | 1 |
_aUpper Saddle River, NJ : _bPrentice Hall, _c2001. |
|
| 300 |
_axiii, 666 p. : _bill. ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references (p. 647) and index. | ||
| 650 |
_aSemiconductors _xDesign and construction _9889 |
||
| 650 |
_aElectronic industries _92734 |
||
| 700 |
_aSerda, Julian _92733 |
||
| 942 | _cBK | ||