TY  - GEN
AU  - Freund, L. B.
AU  - Suresh, S.,
TI  - Thin film materials: stress, defect formation, and surface evolution 
SN  - 9780521529778
AV  - TA418.9.T45 F74 2009
PY  - 2009///
CY  - Cambridge, [England] ; New York
PB  - Cambridge University Press
KW  - Thin films
KW  - İnce filmler
N1  - Includes bibliographical references (p. 713-737) and indexes
UR  - http://www.loc.gov/catdir/description/cam032/2003043937.html
ER  -