TY  - GEN
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication: the science of miniaturization 
SN  - 0849308267
AV  - TK7836 .M33 2002
PY  - 2002///
CY  - Boca Raton
PB  - CRC Press
KW  - Lasers
KW  - Industrial applications
KW  - Mikroelektromekanik sistemler
KW  - Tasarım ve yapım
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Lazerler
KW  - Endüstriyel uygulamalar
KW  - etuturkob
KW  - Integrated circuits
KW  - Entegre devreler
KW  - Mikroelektronik ambalajlama
KW  - Microelectronic packaging
KW  - Microelectronics
KW  - Mikroelektronik
KW  - Machining
KW  - Makineleştirme
N1  - Includes bibliographical references and index; Ch. 1. Lithography --; Ch. 2. Pattern Transfer with Dry Etching Techniques --; Ch. 3. Pattern Transfer with Additive Techniques --; Ch. 4. Wet Bulk Micromachining --; Ch. 5. Surface Micromachining --; Ch. 6. LIGA and Micromolding --; Ch. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing --; Ch. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice --; Ch. 9. Scaling, Actuators, and Power in Miniaturized Systems --; Ch. 10. Miniaturization Applications --; App. A. Metrology Techniques for MEMS --; App. B. Living Book --; App. C. Si and SiO[subscript 2] Etch Rates in KOH --; App. D. Genetics --; App. F. MEMS Companies
ER  -