Fundamentals of microfabrication : the science of miniaturization /
Marc J. Madou.
- 2nd ed.
- 723 p. : col. ill. ; 29 cm.
Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA and Micromolding -- Ch. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing -- Ch. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice -- Ch. 9. Scaling, Actuators, and Power in Miniaturized Systems -- Ch. 10. Miniaturization Applications -- App. A. Metrology Techniques for MEMS -- App. B. Living Book -- App. C. Si and SiO[subscript 2] Etch Rates in KOH -- App. D. Genetics -- App. F. MEMS Companies.
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Lasers--Industrial applications Mikroelektromekanik sistemler--Tasarım ve yapım Microelectromechanical systems--Design and construction Lazerler--Endüstriyel uygulamalar Integrated circuits--Design and construction Entegre devreler--Tasarım ve yapım Mikroelektronik ambalajlama Microelectronic packaging Microelectronics Mikroelektronik Machining Makineleştirme