MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01516 a2200313 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
73360 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
TR-AnTOB |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20200505114445.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
090109s2004 nyua 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471232793 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
CQU |
| Transcribing agency |
CQU |
| Modifying agency |
BGU |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
İngilizce |
| 049 ## - LOCAL HOLDINGS (OCLC) |
|---|
| Holding library |
OSUU |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7871.85 |
| Item number |
.M39 2004 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85 .M39 2004 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
May, Gary S. |
| 9 (RLIN) |
51156 |
| 245 #0 - TITLE STATEMENT |
|---|
| Title |
Fundamentals of semiconductor fabrication / |
| Statement of responsibility, etc. |
Gary S. May, Simon M. Sze. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
New York: |
| Name of producer, publisher, distributor, manufacturer |
Wiley, |
| Date of production, publication, distribution, manufacture, or copyright notice |
c2004. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiii, 305 p. : |
| Other physical details |
ill. ; |
| Dimensions |
26 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
|
| 505 #0 - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Ch.1. |
| Miscellaneous information |
Ch.2. |
| -- |
Ch.3.Silicon Oxidation-- |
| -- |
Ch.4. |
| -- |
Ch.5. |
| -- |
Ch.6 |
| -- |
Ch.7.t |
| -- |
Ch.8. |
| -- |
Ch.9. |
| -- |
Ch.10. |
| -- |
Ch.11. |
| Title |
Introduction-- |
| -- |
Crystal Growth-- |
| -- |
Photolithography-- |
| -- |
Etching-- |
| -- |
Diffusion-- |
| -- |
Film Deposition-- |
| -- |
Process Integration-- |
| -- |
IC Manufacturing-- |
| -- |
Future Trends and Challenges App. B International System of Units (SI Units) App. C Unit Prefixes App. D Greek Alphabet App. E Physical Constants App. F Properties of Si and GaAs at 300 K App. G Some Properties of the Error Function App. H Basic Kinetic Theory of Gases App. I SUPREM Commands App. J Running PROLITH App. K Percentage Points of the t Distribution App. L Percentage Points of the F Distribution |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Yarı iletkenler |
| General subdivision |
Tasarım ve yapım |
| 9 (RLIN) |
21751 |
|
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Design and construction |
| 9 (RLIN) |
889 |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Sze, Simon M., |
| Dates associated with a name |
1936- |
| 9 (RLIN) |
51157 |
| 902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) |
|---|
| a |
0027705 |
| 903 ## - LOCAL DATA ELEMENT C, LDC (RLIN) |
|---|
| a |
Merkez Kütüphane |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Book |
| Source of classification or shelving scheme |
Library of Congress Classification |
| 945 ## - LOCAL PROCESSING INFORMATION (OCLC) |
|---|
| a |
Kntrl CS |
